Winata, T. and Usman, I. (2013) “The Influence of Silane Gas Flow Rate on Optoelectronic Properties of µc-Si:H Prepared by HWC-VHF-PECVD Technique”, Journal of Mathematical and Fundamental Sciences, 40(2), pp. 130-137. doi: 10.5614/itbj.sci.2008.40.2.3.